Product Introduction:

name Name: Uniform glue developing machine

type number:SC200-DE

country of origin:

answer Use:SC200-DEThe glue leveling and developing machine is a tabletop equipment that can be used for both precision glue leveling operations and semiconductor development and cleaning. It can achieve equipment worth millions of dollars（track）Only then can stability and uniformity be achieved.

Product Overview:

　　SC200-DEThe glue leveling and developing machine is a tabletop equipment that can be used for both precision glue leveling operations and semiconductor development and cleaning. It can achieve equipment worth millions of dollars（track）Only then can stability and uniformity be achieved.
Stainless steel casing is more durable and aesthetically pleasing than plastic or painted metal; industrial grade400Wa servo motor system, using andtrackThe same design and program of the equipment make your process more practical and applicable; The leading maximum achievement among similar products50000RPM/SThe rotational acceleration ensures the stability and extremely high repeatability of uniform glue and development.

Performance parameters:

n The host chassis is made of stainless steel material (resistant to chemical corrosion and easy to clean)

n Spin coating program: up to storage capacity100Group program, each group100Steps, each step can be precise to0.1second

n Rotation speed:0-5,000rpm(Higher speed optional)

n Spin coating acceleration:0-10,000rpm/sec(No load)

n Motor spin coating speed stability performance error< ±1rpm

n Speed regulation accuracy<1rpmRepeatability< 1rpm

n Process time setting:0-3,000 sec/stepTime setting accuracy:0.1sec

n supportwafersize1cm-300mm（12“Round Crystal

n Standard configuration includes two spray systems (developer and deionized water)

Product features:

l The host isSC200-SEUpgraded on the glue machine, adding corrosion-resistant polymer material splash proof cover

l Full program editing function, more convenient intelligent operation, better development/cleaning effect

l Can achieve up to four independent liquid sprays for development/Cleaning work or nitrogen drying

l The controller can automatically control the spray or perform manual operation through the program, making it more convenient to use

l The developing system can be spray type or column flow type, and can be configured as required

l Provide customized development system configuration and tooling design for customers

l High reliability and repeatability, high speed accuracy and higher speed options available

l Can add edge removal adhesive and back adhesive cleaning functions

For inquiries or requests for detailed product information, please contactANALYSIS(Anses)working personnel

National Unified Customer Service: